Publication date: 1 January 2016
Source:Thin Solid Films, Volume 598
Author(s): Tomoya Horide, Kazuki Hara, Kaname Matsumoto
Fabrication of highly oriented Y doped BaZrO3 (Ba(Zr,Y)O3 :BZY) films on YBa2 Cu3 Ox (YBCO) sacrificial buffer layers was investigated. To clarify requirements of orientation control, BZY films were fabricated on various substrates using pulsed laser deposition (PLD). Cube-on-cube orientation relationship was obtained in BZY films on SrTiO3 , LaAlO3 , and MgO(100) regardless of PLD conditions, but orientation of BZY was strongly dependent on PLD conditions on yttria stabilized zirconia(YSZ) and CeO2 (100), showing that perovskite structure or almost the same lattice parameter as BZY is needed to obtain cube-on-cube orientated BZY films. Cube-on-cube orientated BZY films were fabricated on YBCO, whose structure was perovskite, under wide ranging PLD conditions, showing that YBCO sufficiently controls crystalline orientation of BZY films. In addition, highly oriented BZY films were obtained on YBCO/YSZ/Si(100), demonstrating epitaxial BZY films on Si. Since good selective etching ability is also needed in sacrificial buffers, YBCO/BZY films were etched using H3 PO4 . H3 PO4 etching removed the YBCO sacrificial buffers without damaging BZY with etching rate of ~
Source:Thin Solid Films, Volume 598
Author(s): Tomoya Horide, Kazuki Hara, Kaname Matsumoto