Publication date: 31 July 2017
Source:Thin Solid Films, Volume 634
Author(s): Jisu Jiang, Paul A. Kohl
A detailed parametric study on the fabrication of metal-insulator-metal capacitors through the anodization of aluminum in an aqueous ammonium pentaborate octahydrate electrolyte is reported. The dependence of the specific capacitance on anodization voltage (8 V–30 V), time (5 min–60 min), temperature (5 °C–60 °C) and electrolyte concentration (0.01 M–0.05 M) was studied in deionized water and ethylene glycol. A linear increase in capacitance with anodization voltage was found, with the highest capacitance achieved at 473 nF/cm2 in ethylene glycol. Room temperature, long-time anodization time and high electrolyte concentration within the studied range yielded the best quality dielectric films. The leakage current was < 1 nA/cm2 when the dielectric was formed in ethylene glycol. The capacitors fabricated in ethylene glycol satisfy the on-chip capacitors criteria of the International Technology Roadmap for Semiconductor, with quadratic voltage coefficient < 100 ppm/V2.
Source:Thin Solid Films, Volume 634
Author(s): Jisu Jiang, Paul A. Kohl