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Fabrication of precision integrated capacitors

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Publication date: 31 July 2017
Source:Thin Solid Films, Volume 634
Author(s): Jisu Jiang, Paul A. Kohl
A detailed parametric study on the fabrication of metal-insulator-metal capacitors through the anodization of aluminum in an aqueous ammonium pentaborate octahydrate electrolyte is reported. The dependence of the specific capacitance on anodization voltage (8V–30V), time (5min–60min), temperature (5°C–60°C) and electrolyte concentration (0.01M–0.05M) was studied in deionized water and ethylene glycol. A linear increase in capacitance with anodization voltage was found, with the highest capacitance achieved at 473nF/cm2 in ethylene glycol. Room temperature, long-time anodization time and high electrolyte concentration within the studied range yielded the best quality dielectric films. The leakage current was <1nA/cm2 when the dielectric was formed in ethylene glycol. The capacitors fabricated in ethylene glycol satisfy the on-chip capacitors criteria of the International Technology Roadmap for Semiconductor, with quadratic voltage coefficient<100ppm/V2.


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