Publication date: 1 August 2017
Source:Thin Solid Films, Volume 635
Author(s): Hironobu Umemoto, Atsushi Miyata
Metal wires, such as W, Mo, and Ta, can be boronized to become sinks of B atoms by heating them in the presence of a mixture of H2 and H3 NBH3 or (BH)3 (NH)3 . These boronized wires behave as sources of B atoms when heated in vacuum. The density of B atoms released to the gas phase increases with the addition of H2 and can be >3 NBH3 and (BH)3 (NH)3 are not explosive, and wires boronized by these species can be used as safe and contamination-free sources of B atoms for surface doping.
Source:Thin Solid Films, Volume 635
Author(s): Hironobu Umemoto, Atsushi Miyata
