Publication date: 30 September 2017
Source:Thin Solid Films, Volume 638
Author(s): K. Nygren, M. Samuelsson, H. Arwin, U. Jansson
We report how the total carbon content and the amorphous carbon (a-C) phase fraction in transition metal carbide/a-C nanocomposite coatings can be obtained using optical methods, which are much more practical for industrial use than conventional X-ray photoelectron spectroscopy. A large set of carbon-containing nanocomposite coatings deposited using different magnetron sputtering techniques were analyzed by X-ray photoelectron spectroscopy, reflectance spectrophotometry, and spectroscopic ellipsometry. The chemical composition and the a-C phase fraction were determined by X-ray photoelectron spectroscopy for each coating and results are presented for the Ti
Source:Thin Solid Films, Volume 638
Author(s): K. Nygren, M. Samuelsson, H. Arwin, U. Jansson