Publication date: 30 September 2017
Source:Thin Solid Films, Volume 638
Author(s): Sung-Eun Lee, Young-Chun Park
To enhance the abrasion resistance of polycarbonate used to replace glass, a silicon oxycarbide thin film was deposited at <2 was used to form the plasma, was above 5002 plasma surface treatments were performed before the depositions.
Source:Thin Solid Films, Volume 638
Author(s): Sung-Eun Lee, Young-Chun Park