Publication date: 1 January 2016
Source:Thin Solid Films, Volume 598
Author(s): Claudia M. Müller, Ralph Spolenak
In this work a systematic in situ annealing study of sputtered Cu–Ta alloys is reported. Under equilibrium conditions Cu and Ta are completely immiscible, the metastable Cu–Ta alloys hence undergo phase separation upon annealing. Using in situ X-ray diffraction the phase evolution at temperatures <x /SiO2 /Si samples.
Source:Thin Solid Films, Volume 598
Author(s): Claudia M. Müller, Ralph Spolenak