Structural, electrical and optical properties of ZnO thin films produced by chemical spray using ethanol in different amounts of the sprayed solution

Publication date: 1 May 2018
Source:Thin Solid Films, Volume 653
Author(s): Dwight Acosta, Alejandra López-Suárez, Carlos Magaña, Francisco Hernández
Transparent conductive and polycrystalline zinc oxide (ZnO) thin films were deposited on sodalime glass substrates using the pneumatic chemical spray technique with different amounts (30, 50 and 70 ml) of sprayed solution. During the synthesis, the surface of the substrates was kept at 400, 450 and 500 °C. The effects of the mentioned parameters on compositional, structural, morphological, electrical and optical properties were studied with Rutherford Backscattering Spectrometry, X-ray diffraction, Scanning Electron Microscopy, the Four Point methods and Ultraviolet and Visible Spectroscopy (UVS). The results show that the atomic Zn concentration in the films increases with the volume of sprayed solution and with the substrate temperature. The Band gap energy seems not to be sensitive to the amount of sprayed solution; meanwhile, the higher band gap energy values were obtained in the samples deposited at Ts = 450 and 500 °C. On the other hand, the lower resistivity values were observed in samples deposited with Ts = 450 °C.