Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Publication date: 30 August 2018
Source:Thin Solid Films, Volume 660
Author(s): Sanni Seppälä, Jaakko Niinistö, Miika Mattinen, Kenichiro Mizohata, Jyrki Räisänen, Wontae Noh, Mikko Ritala, Markku Leskelä