Publication date: Available online 7 January 2016
Source:Thin Solid Films
Author(s): Jiangni Yun, Dan Guo, Yuanyuan Chen, Zhiyong Zhang
Strontium titanate (SrTiO3 ), a typical wide-band-gap perovskite oxide, is a promising candidate for the application of thin film transistor (TFT). In this paper, the Lax Sr1-x TiO3 thin films with different doping concentration are fabricated by sol–gel method. X-ray diffraction (XRD), scanning electron microscope (SEM), atomic force microscope (AFM), UV–Vis-NIR transmission spectroscopy and four point probe instrument are employed to characterize the crystal structure, surface profile, transmittance and resistivity of Lax Sr1-x TiO3 thin films. The results show that Lax Sr1-x TiO3 (x3 cubic phase after La doping. Additionally, the SEM and AFM observation reveal dense grains and smooth surface. Lax Sr1-x TiO3 film possesses high transmittance in visible region. The conductivity of Lax Sr1-x TiO3 thin films is improved tremendously after La doping. The resistivity of La0.04 Sr0.96 TiO3 is 11.7
Source:Thin Solid Films
Author(s): Jiangni Yun, Dan Guo, Yuanyuan Chen, Zhiyong Zhang