Publication date: Available online 16 February 2016
Source:Thin Solid Films
Author(s): F.N. Dultsev, D.V. Nekrasov
Transformation of the films with the pores of different radii under the action of vacuum ultraviolet radiation was studied experimentally and theoretically. Simulation results showed that Si-O-Si angle depends on pore size. Fourier Transform infrared spectra provide indirect confirmation of this statement. The experimental data and calculation results suggest that methyl group decreases π bonding, which causes a decrease in Si–O–Si angle. The action of ultraviolet radiation is to be considered as a photochemical reaction; the fragments formed in this reaction (СН3 *, CH2 *) can participate in polymerization, which leads to pore sealing.
Source:Thin Solid Films
Author(s): F.N. Dultsev, D.V. Nekrasov
