Publication date: 31 March 2016
Source:Thin Solid Films, Volume 603
Author(s): Libin Gao, Shuwen Jiang, Ruguan Li
The cubic pyrochlore Bi1.5 MgNb1.5 O7 (BMN) thin films were deposited on Pt coated sapphire substrates by rf magnetron sputtering using different pressures. The effects of sputtering pressure on phase structure and dielectric properties of BMN thin films were investigated. The X-ray diffraction results revealed that all the BMN thin films deposited at different sputtering pressures showed a pure cubic pyrochlore phase, but the films sputtered at low pressure have a better crystalline than that sputtered at high pressure. The BMN thin films sputtered at 1
Source:Thin Solid Films, Volume 603
Author(s): Libin Gao, Shuwen Jiang, Ruguan Li