Publication date: 31 December 2015
Source:Thin Solid Films, Volume 597
Author(s): Wen-Hua Chen, Hsin-Han Lin, Franklin Chau-Nan Hong
In this study, a large-area (1562 ), sulfur hexafluoride (SF6 ) and oxygen (O2 ), were activated to fabricate nanoscale pyramids by radio frequency plasma. The pre-etching of poly-Si substrates using acidic and alkaline solutions was studied for creating the microstructures, which may affect the subsequent formation of nano-structures by RIE. Both the solar reflectance and the effective carrier lifetimes of multi-crystalline Si surface are measured to understand the effects of two pre-etching solutions. The pre-etching of silicon wafers using the acidic solution before RIE was found to improve the solar cell efficiency better than that using the alkaline solution. The absolute efficiency of solar cells with acidic pre-etching and RIE texturing can be improved by 0.64% over the traditional conventional cells.
Source:Thin Solid Films, Volume 597
Author(s): Wen-Hua Chen, Hsin-Han Lin, Franklin Chau-Nan Hong
