Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O3 films

Publication date: Available online 17 November 2016
Source:Thin Solid Films
Author(s): G. Suchaneck, E. Chernova, A. Kleiner, R. Liebschner, L. Jastrabík, D.C. Meyer, A. Dejneka, G. Gerlach
In this work, we determine the dielectric functions of multi-target, reactively sputtered BaZr0·2Ti0.8O3 by spectroscopic ellipsometry in the photon energy range from 0.8 to 8.7eV. Based on this data, we discuss the interband transition energies and the spectral dependencies of the refractive index and the absorption coefficient.