Publication date: Available online 23 December 2016
Source:Thin Solid Films
Author(s): Rauf Shahzad, TaeWan Kim, Sang-Woo Kang
The synthesis of high-quality, thickness-controlled molybdenum disulfide (MoS2 ) films via vapor-phase growth remains a challenging process. In this work, the synthesis of two-dimensional (2D) MoS2 films via sputtering and sulfurization in a quartz tube furnace was investigated. Thicknesses of MoS2 films were dependent on the thickness of Mo films grown using sputtering. The Raman spectra of the MoS2 films exhibited a 19.122g ) and out-of-plane vibration (A1g ), indicating a monolayer. Room temperature photoluminescence measurements indicate a peak spectral emission at 1.892 films and their crystallization processes were observed using atomic force microscopy and scanning electron microscopy. Low temperature (4502g and A1g , which indicates poor crystallinity. In contrast, using a high sulfurization temperature (750
Source:Thin Solid Films
Author(s): Rauf Shahzad, TaeWan Kim, Sang-Woo Kang