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Anodic oxidization of Ti–Ni–Si amorphous alloy ribbons and their capacitive and resistive properties

Publication date: 30 November 2015
Source:Thin Solid Films, Volume 595, Part A
Author(s): M. Fukuhara, K. Sugawara
Amorphous titanium oxide film on Ti–Ni–Si amorphous alloy ribbons was prepared by anodic polarization process in ten kinds of electrolyte solutions. Addition of NH4F in (NH4)2SO4 solution accelerates an increase in current, i.e. formation of soluble Ti-fluoride complexes, resulting in the amorphous titanium oxide layers with nanometer-sized pores. Pore size decreases down to 12nm with decreasing of applied voltage from 30 to 5V. However, parallel capacitance Cp, series capacitance Cs, and RCs constant increase with decrease of pore size from 23 to 18nm and then decrease in pore size region from 18 to 12nm by formation of penetrating tunnels in the layer. It needs further enhancement of RCs for realization of superior electric storage capacitor.


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