Publication date: Available online 4 April 2016
Source:Thin Solid Films
Author(s): A. Karimi, D. La Grange, N. Goebbels, A. Santana
Nb1-x Tix Ny thin films with different nitrogen contents (0.52 2 /(N2 1-x Tix N was observed for the entire range of (x). The dominant orientation of the crystallites was (111), while a significant contribution of (311) was detected at higher Nb/Ti. The determination of stressed and stress-free lattice parameters allowed correlating the relative reduction of the compressive residual stress, hardness, and modulus in the nitrogen-rich films to the formation of vacancies in the metal sublattice.
Source:Thin Solid Films
Author(s): A. Karimi, D. La Grange, N. Goebbels, A. Santana