Publication date: Available online 2 December 2015
Source:Thin Solid Films
Author(s): Ray-Hua Horng, Sin-Liang Ou, Chiung-Yi Huang, Chih-I Wu
In this study, Ga-doped ZnO (GZO) thin films were grown on sapphire substrates at a low temperature of 3502 ambient. After RTA process, the crystal quality of GZO films was enhanced. From the transmittance spectra, it was found that the as-deposited and annealed GZO films both possessed high transparency above 90% with the wavelength range from 400 to 800
Source:Thin Solid Films
Author(s): Ray-Hua Horng, Sin-Liang Ou, Chiung-Yi Huang, Chih-I Wu