Grazing-incidence mirrors with enhanced reflectance in the soft X-ray region

Publication date: Available online 2 December 2015
Source:Thin Solid Films
Author(s): N.I. Chkhalo, P.K. Gaikovich, N.N. Salashchenko, P.A. Yunin, S.Yu. Zuev
A design strategy for the fabrication broad-band grazing-incidence mirrors in the wavelength range of 0.8–18nm is proposed. Instead of high-density materials, we propose a bilayer coating consisting of the high-density material most suitable for the task coated with a thin film of low-density material. In the wavelength range of 4–18nm, an increase of the reflection coefficients of such coatings by 10–20% compared with the single high-density layers traditionally used is theoretically expected. We also present an experimental demonstration of such advantageous properties based on a Cr-C bilayer film.